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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2008, vol.17, no.1
2008, vol.17, no.2
2008, vol.17, no.3
2008, vol.17, no.4
2008, vol.17, no.5
2008, vol.17, no.6
题名
作者
出版年
年卷期
A Compact Squeeze-Film Model Including Inertia, Compressibility, and Rarefaction Effects for Perforated 3-D MEMS Structures
Suhas S. Mohite; Venkata R. Sonti; Rudra Pratap
2008
2008, vol.17, no.3
Harmonic Balance Nonlinear Identification of a Capacitive Dual-Backplate MEMS Microphone
Jian Liu; David T. Martin; Toshikazu Nishida; Louis N. Cattafesta, III; Mark Sheplak; Brian P. Mann
2008
2008, vol.17, no.3
Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures
Neal A. Hall; Murat Okandan; Robert Littrell; Baris Bicen; F. Levent Degertekin
2008
2008, vol.17, no.3
Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly
Vincent A. Henneken; Wouter P. Sassen; Wim van der Vlist; Wim H. A. Wien; Marcel Tichem; Pasqualina M. Sarro
2008
2008, vol.17, no.3
Passive Reduced-Order Macromodeling Algorithm for Microelectromechanical Systems
Rumi Zhang; Wei Wang; Anestis Dounavis; Graham A. Jullien
2008
2008, vol.17, no.3
Micromachined RF-Coupled Cantilever Inverted-Micro strip Millimeter-Wave Filters
Stepan Lucyszyn; Kenichi Miyaguchi; Hong W. Jiang; Ian D. Robertson; Gavin Fisher; Anthony Lord; Joo-Young Choi
2008
2008, vol.17, no.3
Nanoscale Pattern Definition on Nonplanar Surfaces Using Ion Beam Proximity Lithography and Conformal Plasma-Deposited Resist
Dhara Parikh; Barry Craver; Hatem N. Nounu; Fu-On Fong; John C. Wolfe
2008
2008, vol.17, no.3
Modeling of Coupled Dome-Shaped Microoscillators
Tuhin Sahai; Alan T. Zehnder
2008
2008, vol.17, no.3
Minimum Energy Actuation and Bounce-Back Behavior of Microbeams Using δ Voltage Pulses
Yuyan Wang; Joseph J. Talghader
2008
2008, vol.17, no.3
Temperature Dependence of Quality Factor in MEMS Resonators
Bongsang Kim; Matthew A. Hopcroft; Rob N. Candler; Chandra Mohan Jha; Manu Agarwal; Renata Melamud; Saurabh A. Chandorkar; Gary Yama; Thomas W. Kenny
2008
2008, vol.17, no.3
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