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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2008, vol.17, no.1
2008, vol.17, no.2
2008, vol.17, no.3
2008, vol.17, no.4
2008, vol.17, no.5
2008, vol.17, no.6
题名
作者
出版年
年卷期
Electrothermal Microgripper With Large Jaw Displacement and Integrated Force Sensors
Trinh Chu Duc; Gih-Keong Lau; J. Fredrik Creemer; Pasqualina M. Sarro
2008
2008, vol.17, no.6
Two-Layer Electroplated Microcoils With a PECVD Silicon Dioxide Interlayer Dielectric
Dariusz Golda; Jeffrey H. Lang; Martin L. Culpepper
2008
2008, vol.17, no.6
A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability
Mohammad Faisal Zaman; Ajit Sharma; Zhili Hao; Farrokh Ayazi
2008
2008, vol.17, no.6
Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon Microhotplate
Jungchul Lee; Christopher M. Spadaccini; Erik V. Mukerjee; William P. King
2008
2008, vol.17, no.6
Electrowetting for Tunable Microoptics
Florian Krogmann; Wolfgang Monch; Hans Zappe
2008
2008, vol.17, no.6
Evanescent-Wave Spectroscopy Using an SU-8 Waveguide for Rapid Quantitative Detection of Biomolecules
Linan Jiang; Karl P. Gerhardt; Brian Myer; Yitshak Zohar; Stanley Pau
2008
2008, vol.17, no.6
Hydrogenation-Assisted Lateral Micromachining of (111) Silicon Wafers
Sara Darbari; Soheil Azimi; Shamsoddin Mohajerzadeh; Amir Sammak; Nima Izadi; Shaya Famini
2008
2008, vol.17, no.6
Room-Temperature Fabrication of Anodic Tantalum Pentoxide for Low-Voltage Electrowetting on Dielectric (EWOD)
Yifan Li; William Parkes; Les I. Haworth; Alan W. S. Ross; J. Tom M. Stevenson; Anthony J. Walton
2008
2008, vol.17, no.6
Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method
Gino Rinaldi; Muthukumaran Packirisamy; Ion Stihara
2008
2008, vol.17, no.6
Cryogenic Performance of RF MEMS Switch Contacts
Chris Brown; Arthur S. Morris; Angus I. Kingon; Jacqueline Krim
2008
2008, vol.17, no.6
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