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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998~2013



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2008, vol.17, no.1 2008, vol.17, no.2 2008, vol.17, no.3 2008, vol.17, no.4 2008, vol.17, no.5 2008, vol.17, no.6

题名作者出版年年卷期
Electrothermal Microgripper With Large Jaw Displacement and Integrated Force SensorsTrinh Chu Duc; Gih-Keong Lau; J. Fredrik Creemer; Pasqualina M. Sarro20082008, vol.17, no.6
Two-Layer Electroplated Microcoils With a PECVD Silicon Dioxide Interlayer DielectricDariusz Golda; Jeffrey H. Lang; Martin L. Culpepper20082008, vol.17, no.6
A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias InstabilityMohammad Faisal Zaman; Ajit Sharma; Zhili Hao; Farrokh Ayazi20082008, vol.17, no.6
Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon MicrohotplateJungchul Lee; Christopher M. Spadaccini; Erik V. Mukerjee; William P. King20082008, vol.17, no.6
Electrowetting for Tunable MicroopticsFlorian Krogmann; Wolfgang Monch; Hans Zappe20082008, vol.17, no.6
Evanescent-Wave Spectroscopy Using an SU-8 Waveguide for Rapid Quantitative Detection of BiomoleculesLinan Jiang; Karl P. Gerhardt; Brian Myer; Yitshak Zohar; Stanley Pau20082008, vol.17, no.6
Hydrogenation-Assisted Lateral Micromachining of (111) Silicon WafersSara Darbari; Soheil Azimi; Shamsoddin Mohajerzadeh; Amir Sammak; Nima Izadi; Shaya Famini20082008, vol.17, no.6
Room-Temperature Fabrication of Anodic Tantalum Pentoxide for Low-Voltage Electrowetting on Dielectric (EWOD)Yifan Li; William Parkes; Les I. Haworth; Alan W. S. Ross; J. Tom M. Stevenson; Anthony J. Walton20082008, vol.17, no.6
Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz MethodGino Rinaldi; Muthukumaran Packirisamy; Ion Stihara20082008, vol.17, no.6
Cryogenic Performance of RF MEMS Switch ContactsChris Brown; Arthur S. Morris; Angus I. Kingon; Jacqueline Krim20082008, vol.17, no.6
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