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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2006, vol.15, no.1
2006, vol.15, no.2
2006, vol.15, no.3
2006, vol.15, no.4
2006, vol.15, no.5
2006, vol.15, no.6
题名
作者
出版年
年卷期
An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot
Bruce R. Donald; Christopher G. Levey; Craig D. McGray; Igor Paprotny; Daniela Rus
2006
2006, vol.15, no.1
Latching Micromagnetic Optical Switch
Zhilin Huang; Jim Shen
2006
2006, vol.15, no.1
Scanning Micromirrors Fabricated by an SOI/SOI Wafer-Bonding Process
Lixia Zhou; Joseph M. Kahn; Kristofer S. J. Pister
2006
2006, vol.15, no.1
Robust Design and Model Validation of Nonlinear Compliant Micromechanisms
Jonathan W. Wittwer; Michael S. Baker; Larry L. Howell
2006
2006, vol.15, no.1
Buckling and Free Oscillations of Composite Microresonators
He Li; B. Balachandran
2006
2006, vol.15, no.1
Built-in Self-Test of MEMS Accelerometers
Nilmoni Deb; R. D. (Shawn) Blanton
2006
2006, vol.15, no.1
Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning
Luis Alexandra Rocha; Edmond Cretu; Reinoud F. Wolffenbuttel
2006
2006, vol.15, no.1
Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion Etching
J. X. Gao; L. P. Yeo; M. B. Chan-Park; J. M. Miao; Y. H. Yan; J. B. Spn; Y. C. Lam; C. Y. Yue
2006
2006, vol.15, no.1
Electrochemical Process for the Lamination of Magnetic Cores in Thin-Film Magnetic Components
Magali Brunei; Terence O'Donnell; Andrew M. Connell; Paul McCloskey; Sean Cian O. Mathuna
2006
2006, vol.15, no.1
Impact Behavior and Energy Transfer Efficiency of Pulse-Driven Bent-Beam Electrothermal Actuators
Yoshinobu Shimamura; Kabir Udeshi; Long Que; Jaehyun Park; Yogesh B. Gianchandani
2006
2006, vol.15, no.1
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