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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2002, vol.11, no.1 2002, vol.11, no.2 2002, vol.11, no.3 2002, vol.11, no.4 2002, vol.11, no.5 2002, vol.11, no.6

题名作者出版年年卷期
Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of pyrex glassXinghua Li; Takashi Abe; Yougxun Liu; Masayoshi Esashi20022002, vol.11, no.6
Process compatible polysilicon-based electrical through-wafer interconnects in silicon substratesEugene M. Chow; Venkataraman Chandrasekaran; Aaron Partridge; Toshikazu Nishida; Mark Sheplak; Calvin F. Quate; Thomas W. Kenny20022002, vol.11, no.6
Fabrication of wafer-level thermocompression bondsChristine H. Tsau; S. Mark Spearing; Martin A. Schmidt20022002, vol.11, no.6
A MEMS piggyback actuator for hard-disk drivesHiroshi Toshiyoshi; Makoto Mita; Hiroyuki Fujita20022002, vol.11, no.6
The piezoelectric valve-less pump-improved dynamic modelAmos Ullmann; Ilan Fono20022002, vol.11, no.6
A thermal-bubble-actuated micronozzle-diffuser pumpJr-Hung Tsai; Liwei Lin20022002, vol.11, no.6
A planar electroosmotic micropumpChuan-Hua Chen; Juan G. Santiago20022002, vol.11, no.6
Design, fabrication, and testing of an electrohydrodynamic ion-drag micropumpJeff Darabi; Mihai Rada; Michael Ohadi; John Lawler20022002, vol.11, no.6
A fast method for particulate microflowsDong Liu; Martin Maxey; George Em Karniadakis20022002, vol.11, no.6
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motionsCagri A. Savran; Andrew W. Sparks; Joachim Sihler; Jian Li; Wan-Chen Wu; Dean E. Berlin; Thomas P. Burg; Jurgen Fritz; Martin A. Schmidt; Scott R. Manalis20022002, vol.11, no.6
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