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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2002, vol.11, no.1
2002, vol.11, no.2
2002, vol.11, no.3
2002, vol.11, no.4
2002, vol.11, no.5
2002, vol.11, no.6
题名
作者
出版年
年卷期
Surface micromachined paraffin-actuated microvalve
Edwin T. Carlen; Carlos H. Mastrangelo
2002
2002, vol.11, no.5
A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks
Hidekuni Takao; Makoto Ishida; Kazuaki Sawada
2002
2002, vol.11, no.5
A high-resolution high-frequency monolithic top-shooting microinjector free of satellite drops - Part I: concept, design, and model
Fan-Gang Tseng; Chang-Jin Kim; Chih-Ming Ho
2002
2002, vol.11, no.5
A high-resolution high-frequency monolithic top-shooting microinjector free of satellite drops - Part II: fabrication, implementation, and characterization
Fan-Gang Tseng; Chang-Jin Kim; Chih-Ming Ho
2002
2002, vol.11, no.5
Bubble-free electrokinetic pumping
Ponnambalam Selvaganapathy; Yit-Shun Leung Ki; Philippe Renaud; Carlos H. Mastrangelo
2002
2002, vol.11, no.5
A surface-tension driven micropump for low-voltage and low-power operations
Kwang-Seok Yun; Il-Joo Cho; Jong-Uk Bu; Chang-Jin (CJ) Kim; Euisik Yoon
2002
2002, vol.11, no.5
A magnetic microstirrer and array for microfluidic mixing
Liang-Hsuan Lu; Kee Suk Ryu; Chang Liu
2002
2002, vol.11, no.5
Micromachined silicon nitride solid immersion lens
Kenneth B. Crozier; Daniel A. Fletcher; Gordon S. Kino; Calvin F. Quate
2002
2002, vol.11, no.5
Measurement system for full three-dimensional motion characterization of MEMS
Christian Rembe; Richard S. Muller
2002
2002, vol.11, no.5
Measurements of material properties using differential capacitive strain sensors
Larry L. Chu; Long Que; Yogesh B. Gianchandani
2002
2002, vol.11, no.5
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