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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2002
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2002, vol.11, no.1
2002, vol.11, no.2
2002, vol.11, no.3
2002, vol.11, no.4
2002, vol.11, no.5
2002, vol.11, no.6
题名
作者
出版年
年卷期
Investigation of strain in microstructures by a novel moire method
Biao Li; Huimin Xie; Bai Xu; Robert Geer; James Castracane
2002
2002, vol.11, no.6
Tunable optical filter of porous silicon as key component for a MEMS spectrometer
Gerhard Lammel; Sandra Schweizer; Sebastien Schiesser; Philippe Renaud
2002
2002, vol.11, no.6
V-band reflection-type phase shifters using micromachined CPW coupler and RF switches
Jae-Hyoung Park; Hong-Teuk Kim; Wooyeol Choi; Youngwoo Kwon; Yong-Kweon Kim
2002
2002, vol.11, no.6
Electrically tunable collective response in a coupled micromechanical array
Eyal Buks; Michael L. Roukes
2002
2002, vol.11, no.6
Piezoresistive accelerometers for MCM package
Jose A. Plaza; Ana Collado; Enric Cabruja; Jaume Esteve
2002
2002, vol.11, no.6
A vacuum packaged surface micromachined resonant accelerometer
Ashwin A. Seshia; Moorthi Palaniapan; Trey A. Roessig; Roger T. Howe; Roland W. Gooch; Thomas R. Schimert; Stephen Montague
2002
2002, vol.11, no.6
Energy dissipation in submicrometer thick single-crystal silicon cantilevers
Jinling Yang; Takahito Ono; Masayoshi Esashi
2002
2002, vol.11, no.6
Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation
William P. King; Thomas W. Kenny; Kenneth E. Goodson; Graham L. W. Cross; Michel Despont; Urs T. Durig; Hugo Rothuizen; Gerd Binnig; Peter Vettiger
2002
2002, vol.11, no.6
Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces
James A. Knapp; Maarten P. de Boer
2002
2002, vol.11, no.6
Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beams
Michael S. Baker; Maarten P. de Boer; Norman F. Smith; Larry K. Warne; Michael B. Sinclair
2002
2002, vol.11, no.6
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