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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2001, vol.10, no.1
2001, vol.10, no.2
2001, vol.10, no.3
2001, vol.10, no.4
题名
作者
出版年
年卷期
A methodology and model for the Pull-in parameters of electrostatic actuators
Yael Nemirovsky; Ofir Bochobza-Degani
2001
2001, vol.10, no.4
High-cycle fatigue of single-crystal silicon thin films
Christopher L. Muhlstein; Stuart B. Brown; Robert O. Ritchie
2001
2001, vol.10, no.4
Characterization of micromechanical optical modulator
Huibing Mao; Jinghua Ke; Peisheng Xing; Zongsheng Lai
2001
2001, vol.10, no.4
Batch-processed vacuum-sealed capacitive pressure sensors
Abhijeet V. Chavan; Kensall D. Wise
2001
2001, vol.10, no.4
Manufacturing and packaging of sensors for their integration in a vertical MCM microsystem for biomedical applications
Andreas Gotz; Isabel Gracia; Carles Cane; Anthony Morrissey; John Alderman
2001
2001, vol.10, no.4
An angle-based design approach for rectangular electrostatic torsion actuators
Zhixiong Xiao; Xing Tao Wu; Wuyong Peng; K. R. Farmer
2001
2001, vol.10, no.4
Microgimbal torsion beam design using open, thin-walled cross sections
Lilac Muller; Albert P. Pisano; Roger T. Howe
2001
2001, vol.10, no.4
Application of a parallel DSMC technique to predict flow characteristics of microfluidic filters
Ozgur Aktas N. R. Aluru; Umberto Ravaioli
2001
2001, vol.10, no.4
Fabrication of ultrathin P{sup}(++) silicon microstructures using ion implantation and boron etch-stop
Chunchieh Huang; Khalil Najafi
2001
2001, vol.10, no.4
Low-temperature wafer-level transfer bonding
Frank Niklaus; Peter Enoksson; Patrick Griss; Edvard Kalvesten; Goran Stemme
2001
2001, vol.10, no.4
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