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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2013
2013, vol.22, no.1
题名
作者
出版年
年卷期
Lateral Contact Three-State RF MEMS Switch for Ground Wireless Communication by Actuating Rhombic Structures
Li-Feng Wang; Lei Han; Jie-Ying Tang; Qing-An Huang
2013
2013, vol.22, no.1
Resonance-Enhanced Piezoelectric Microphone Array for Broadband or Prefiltered Acoustic Sensing
Lukas Baumgartel; Arash Vafanejad; Shih-Jui Chen; Eun Sok Kim
2013
2013, vol.22, no.1
MEMS Kinematics by Super-Resolution Fluorescence Microscopy
Craig D. McGray; Samuel M. Stavis; Joshua Giltinan; Eric Eastman; Samara Firebaugh; Jenelle Piepmeier; Jon Geist; Michael Gaitan
2013
2013, vol.22, no.1
Two New Methods to Improve the Lithography Precision for SU-8 Photoresist on Glass Substrate
Xu Mao; Jinling Yang; An Ji; Fuhua Yang
2013
2013, vol.22, no.1
Near-Field Electrospray Microprinting of Polymer-Derived Ceramics
Hongxu Duan; Cheng Li; Weiwei Yang; Brandon Lojewski; Linan An; Weiwei Deng
2013
2013, vol.22, no.1
Fabrication and Patterning of Magnetic Polymer Micropillar Structures Using a Dry-Nanoparticle Embedding Technique
Farzad Khademolhosseini; Mu Chiao
2013
2013, vol.22, no.1
Optimization of Angular Alignment in Self-Assembly of Thin Parts at an Air-Water Interface
Kwang Soon Park; Ji Hao Hoo; Rajashree Baskaran; Karl F. Bohringer
2013
2013, vol.22, no.1
Mechanical Characterization of Polycrystalline and Amorphous Silicon Carbide Thin Films Using Bulge Test
Sreedevi Maruthoor; Ajesh Ajayakumar; Tino Fuchs; Oleg Jakovlev; Holger Reinecke; Jurgen Wilde
2013
2013, vol.22, no.1
Size-Controllable Monodispersed Microsphere Generation by Liquid Chopper Utilizing PZT Actuator
Ki-Young Song; Wen-Jun Zhang; Madan M. Gupta
2013
2013, vol.22, no.1
A Microcalorimeter Integrated With Carbon Nanotube Interface Layers for Fast Detection of Trace Energetic Chemicals
Wenzhou Ruan; Zheyao Wang; Yuanchao Li; Litian Liu
2013
2013, vol.22, no.1
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