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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2013
2013, vol.22, no.1
题名
作者
出版年
年卷期
SU-8 2002 Surface Micromachined Deformable Membrane Mirrors
Sarah J. Lukes; David L. Dickensheets
2013
2013, vol.22, no.1
Simple Removal Technology of Chemically Stable Polymer in MEMS Using Ozone Solution
Shinya Yoshida; Hideaki Yanagida; Masayoshi Esashi; Shuji Tanaka
2013
2013, vol.22, no.1
A Microdischarge-Based Deflecting-Cathode Pressure Sensor in a Ceramic Package
Scott A. Wright; Heidi Z. Harvey; Yogesh B. Gianchandani
2013
2013, vol.22, no.1
A MEMS Bistable Device With Push-On-Push-Off Capability
Hen-Wei Huang; Yao-Joe Yang
2013
2013, vol.22, no.1
Magnetoelectric Flexural Gate Transistor With Nanotesla Sensitivity
Feng Li; Rajiv Misra; Zhao Fang; Yufei Wu; Peter Schiffer; Qiming Zhang; Srinivas Tadigadapa; Suman Datta
2013
2013, vol.22, no.1
Self-Patterned Gold-Electroplated Multicapillary Ga Separation Columns With MPG Stationary Phases
Hamza Shakeel; Masoud Agah
2013
2013, vol.22, no.1
Fabrication of a Microscale Device for Detection of Nitroaromatic Compounds
Christy D. Petruczok; Hyungryul J. Choi; Se Young Yang; Ayse Asatekin; Karen K. Gleason; George Barbastathis
2013
2013, vol.22, no.1
Fabrication and Characterization of Biologically Inspired Curved-Surface Artificial Compound Eyes
Qing He; Jingquan Liu; Bin Yang; Yunzhao Dong; Chunsheng Yang
2013
2013, vol.22, no.1
Investigation of Cellular Contraction Forces in the Frequency Domain Using a PDMS Micropillar-Based Force Transducer
Ping Du; Chen Cheng; Hongbing Lu; Xin Zhang
2013
2013, vol.22, no.1
Interfacial Mechanical Properties of n-Alkylsilane Monolayers on Silicon Substrates
Brian G. Bush; Frank W. Del Rio; Cherno Jaye; Daniel A. Fischer; Robert F. Cook
2013
2013, vol.22, no.1
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