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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1998, vol.7, no.1 1998, vol.7, no.2

题名作者出版年年卷期
A high-sensitivity Z-axis capacitive silicon microaccelerometer with a torsional suspensionA. Selvakumar; K. Najafi19981998, vol.7, no.2
A low-temperature IC-compatible process for fabricating surface-micromachined metallic microchannelsI. Papautsky; J. Brazzle; H. Swerdlow; A. B. Frazier19981998, vol.7, no.2
A novel integrated silicon capacitive microphone--floating electrode "electret" microphone (FEEM)Quanbo Zou; Zhimin Tan; Zhenfeng Wang; Jiangtao Pang; Xin Qian; Qingxin Zhang; Rongming Lin;19981998, vol.7, no.2
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachinesU. Srinivasan; M. R. Houston; R. T. Howe; R. Maboudian19981998, vol.7, no.2
Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolutionCheng-Hsien Liu; A. M. Barzilai; J. K. Reynolds; A. Partridge; T. W. Kenny; J. D. Grade19981998, vol.7, no.2
Design and fabrication of an angular microactuator for magnetic disk drivesD. A. Horsley; M. B. Cohn; A. Singh; R. Horowitz; A. P. Pisano19981998, vol.7, no.2
Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonatorsR. R. A. Syms19981998, vol.7, no.2
Fabrication of thick Si resonators with a frontside-release etch-diffusion processJ. W. Weigold; S. W. Pang19981998, vol.7, no.2
Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substratesR. J. Jackman; S. T. Brittain; G. M. Whitesides19981998, vol.7, no.2
Fully integrate magnetically actuated micromachined relaysW. P. Taylor; O. Brand; M. G. Allen19981998, vol.7, no.2
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