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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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1998, vol.7, no.1
1998, vol.7, no.2
题名
作者
出版年
年卷期
Thin-film shape-memory alloy actuated micropumps
W. L. Benard; H. Kahn; A. H. Heuer; M. A. Huff
1998
1998, vol.7, no.2
Parametric modeling of a microaccelerometer: comparing I- and D-optimal design of experiments for finite-element analysis
Y. B. Gianchandani; S. B. Crary
1998
1998, vol.7, no.2
On the calibration of multicomponent microforce sensors
Wenlin Jin; C. D. Mote
1998
1998, vol.7, no.2
Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control
V. D. Samper; A. J. Sangster; R. L. Reuben; U. Wallrabe
1998
1998, vol.7, no.2
MEMS milliactuator for hard-disk-drive tracking servo
T. Hirano; Long-Sheng Fan; J. Q. Gao; W. Y. Lee
1998
1998, vol.7, no.2
Independent tuning of linear and nonlinear stiffness coefficients
S. G. Adams; F. M. Bertsch; K. A. Shaw; N. C. MacDonald
1998
1998, vol.7, no.2
High-aspect-ratio Si vertical micromirror arrays for optical switching
W. -H. Juan; S. W. Pang
1998
1998, vol.7, no.2
Fully integrate magnetically actuated micromachined relays
W. P. Taylor; O. Brand; M. G. Allen
1998
1998, vol.7, no.2
Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates
R. J. Jackman; S. T. Brittain; G. M. Whitesides
1998
1998, vol.7, no.2
Fabrication of thick Si resonators with a frontside-release etch-diffusion process
J. W. Weigold; S. W. Pang
1998
1998, vol.7, no.2
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