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期刊


ISSN1063-7397
刊名Russian Microelectronics
参考译名俄罗斯微电子学
收藏年代2002～2023



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2020 2021 2022 2023

2003, vol.32, no.1 2003, vol.32, no.2 2003, vol.32, no.3 2003, vol.32, no.4 2003, vol.32, no.5 2003, vol.32, no.6

题名作者出版年年卷期
Thermally induced viscous flow of borophosphosilicate-glass thin films on stepped surfaces - Part 1: a review of quantitative studies on furnace and rapid thermal annealingV. Y. Vasilev20032003, vol.32, no.3
Selective anodizing for making multilevel interconnectionsA. I. Vorob'eva; V. A. Sokol; V. M. Parkun20032003, vol.32, no.3
Formation and properties of an oxide film on an Si{sub}3N{sub}4 surface under thermal oxidationA. E. Ivanchikov; A. M. Kisel; V. I. Plebanovich; V. I. Pachynin; V. E. Borisenko20032003, vol.32, no.3
Mechanism of the ultradeep anisotropic chemical etching of Si(100) in the microfabrication of piezoresistive pressure sensorsL. V. Sokolov; S. V. Arkhipov; V. M. Shkol'nikov20032003, vol.32, no.3
Al{sub}xGa{sub}(1-x)As/GaAs/Al{sub}xGa{sub}(1-x)As double quantum well with a thin AlAs interwell barrier: structural characterization by SIMS and XRDA. M. Afanas'ev; G. B. Galiev; R. M. Imamov; E. A. Klimov; A. A. Lomov; V. G. Mokerov; V. V. Saraikin; M. A. Chuev20032003, vol.32, no.3
Quantitative optical inspection of mirror-like wafer surfacesS. F. Sen'ko; A. S. Sen'ko; V. A. Zelenin; E. G. Puglachenko20032003, vol.32, no.3
Triple-collector lateral bipolar magnetotransistor: response mechanism and relative sensitivityA. V. Kozlov; M. A. Korolev; S. Yu. Smirov; Yu. A. Chaplygin; R. D. Tikhonov20032003, vol.32, no.3
Fractal analysis of digital systems: the structure and properties of the scale factorP. A. Arutyunov20032003, vol.32, no.3
Delay-conscious switch-level modeling of MOS LSI circuitsL. A. Zolotorevich20032003, vol.32, no.3



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