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期刊
ISSN
0957-0233
刊名
Measurement Science & Technology
参考译名
测量科学与技术
收藏年代
1990~2013
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2011, vol.22, no.1
2011, vol.22, no.10
2011, vol.22, no.11
2011, vol.22, no.12
2011, vol.22, no.2
2011, vol.22, no.4
2011, vol.22, no.5
2011, vol.22, no.6
2011, vol.22, no.7
2011, vol.22, no.8
2011, vol.22, no.9
题名
作者
出版年
年卷期
Synchrotron radiation-based x-ray reflection and scattering techniques for dimensional nanometrology
Michael Krumrey; Gudrun Gleber; Frank Scholze; Jan Wernecke
2011
2011, vol.22, no.9
White-light fringe detection based on a novel light source and colour CCD camera
Z. Buchta; B. Mikel; J. Lazar; O. Cip
2011
2011, vol.22, no.9
Multidimensional interferometric tool for the local probe microscopy nanometrology
Jan Hrabina; Josef Lazar; Petr Klapetek; Ondrej Cip
2011
2011, vol.22, no.9
Toward interferometry for dimensional drift measurements with nanometer uncertainty
D. Voigt; J. D. Ellis; A. L. Verlaan; R. H. Bergmans; J. W. Spronck; R. H. Munnig Schmidt
2011
2011, vol.22, no.9
Measuring value correction and uncertainty analysis for homodyne interferometers
T. Hausotte; B. Percle; E. Manske; R. Fussl; G. Jager
2011
2011, vol.22, no.9
A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor
Jeremias Seppa; Virpi Korpelainen; Mikko Merimaa; Gian Bartolo Picotto; Antti Lassila
2011
2011, vol.22, no.9
Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range
Sebastian Strube; Gabor Molnar; Hans-Ulrich Danzebrink
2011
2011, vol.22, no.9
High-accuracy Fabry-Perot displacement interferometry using fiber lasers
Mathieu Durand; John Lawall; Yicheng Wang
2011
2011, vol.22, no.9
Deep ultraviolet scatterometer for dimensional characterization of nanostructures: system improvements and test measurements
Matthias Wurm; Stefanie Bonifer; Bernd Bodermann; Jan Richter
2011
2011, vol.22, no.9
A high-resolution measurement system for novel scanning thermal microscopy resistive nanoprobes
Grzegorz Wielgoszewski; Przemyslaw Sulecki; Pawel Janus; Piotr Grabiec; Ehrenfried Zschech; Teodor Gotszalk
2011
2011, vol.22, no.9
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