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1999, vol.11, no.1	1999, vol.11, no.2	1999, vol.11, no.3	1999, vol.11, no.4	1999, vol.11, no.5	1999, vol.11, no.6
1999, vol.11, no.7	1999, vol.11, no.8

题名	作者	出版年	年卷期
A high-yield drying process for surface-micromachined structures using magnetostatic forces	Chang Liu; Thomas Tsao; Yu-Chong Tai	1999	1999, vol.11, no.2
Investigation of MEMS packaging using multichip module foundries	Jeffrey T. Butler; Victor M. Bright; Richard J. Saia	1999	1999, vol.11, no.2
Thin film shear modulus determination with quartz crystal resonators	Ralf Lucklum; Carsten Behling; Peter Hauptmann	1999	1999, vol.11, no.2
Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranes	Katarina Verhaegen; Kris Baert; Bob Puers; Willy Sansen; Lou Hermans; Robert Mertens	1999	1999, vol.11, no.2