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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2004, vol.10, no.10 2004, vol.10, no.2 2004, vol.10, no.3 2004, vol.10, no.4 2004, vol.10, no.5 2004, vol.10, no.6-7
2004, vol.10, no.8-9

题名作者出版年年卷期
Microfabrication by hot embossing and injection molding at LASTIH. Mekaru; T. Yamada; S. Van; T. Hattori20042004, vol.10, no.10
Metallic microgripper with SU-8 adaptor as end-effectors for heterogeneous micro/nano assembly applicationsK. Kim; E. Nilsen; T. Huang; A. Kirn; M. Ellis; G. Skidmore; J.-B. Lee20042004, vol.10, no.10
Using megasonic development of SU-8 to yield ultra-high aspect ratio microstructures with UV lithographyJ. D. Williams; W. Wang20042004, vol.10, no.10
Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technologyJ. D. Williams; W. Wang20042004, vol.10, no.10
Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometerC. Solf; A. Janssen; J. Mohr; A. Ruzzu; U. Wallrabe20042004, vol.10, no.10
Hybrid replication development for construction of polymeric devicesC. Khan Malek; G. Thuillier; P. Blind20042004, vol.10, no.10
Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layersV. Nazmov; E. Reznikova; J. Mohr; A. Snigirev; I. Snigireva; S. Achenbach; V. Saile20042004, vol.10, no.10
Preliminary results of fracture mechanics analysis on the quality of LIGA sidewallsM. S. Guimaraes; P. Meyer; L Hahn; J. Schulz20042004, vol.10, no.10
Improvements in graphite-based X-ray mask fabrication for ultradeep X-ray lithographyR. Divan; D. C. Mancini; S. M. Gallagher; J. Booske; D. Van der Weide20042004, vol.10, no.10



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