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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2003, vol.10, no.1 2003, vol.9, no.3 2003, vol.9, no.4 2003, vol.9, no.5 2003, vol.9, no.6-7 2003, vol.9, no.8

题名作者出版年年卷期
Chemical mechanical polishing as a toolbox for thin film magnetic head manufacturingH. van Heeren; T. Bertens; F. Pronk; K. Attenborough20032003, vol.9, no.3
Micro-structured flow fields for small fuel cellsM. Muller; C. Muller; F. Gromball; M. Wolfle; W. Menz20032003, vol.9, no.3
Surface roughness control by energy shift in deep X-ray lithographyY. Cheng; C. -N. Chen; C. -C. Chieng; F. G. Tseng; J. T. Sheu20032003, vol.9, no.3
Study of silicon backside damage in deep reactive ion etching for bonded silicon-glass structuresY. Yoshida; M. Kumagai; K. Tsutsumi20032003, vol.9, no.3
High-aspect-ratio microstructures fabricated by X-ray lithography of polymethylsilsesquioxane-based spin-on glass thick filmsY. Liu; T. Cui; P. J. Coane; M. J. Vasile; J. Goettert20032003, vol.9, no.3
Ultra thin ICs and MEMS elements: techniques for wafer thinning, stress-free separation, assembly and interconnectionM. Feil; C. Adler; G. Klink; M. Konig; C. Landesberger; S. Scherbaum;Ｇ．Schwinn; H. Spohrle20032003, vol.9, no.3
Mechanical behavior of aluminum foils as micro structural material under low velocity impact loadingT. Auzanneau; C. Sato20032003, vol.9, no.3
Injection molding for microstructures controlling mold-core extrusion and cavity heat-fluxC. Yan; M. Nakao; T. Go; K. Matsumoto; Y. Hatamura20032003, vol.9, no.3
Restrictions in the design of gear wheel components and drives for micro technologyA. Albers; N. Burkardt; J. Marz20032003, vol.9, no.3
LiGA measurement and acceptance evaluationB. L. Dearth; R. G. Steinhoff, Jr.20032003, vol.9, no.3
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