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期刊
ISSN
0914-4935
刊名
Sensors and materials
参考译名
传感器与材料
收藏年代
1998~2023
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2002, vol.14, no.1
2002, vol.14, no.2
2002, vol.14, no.3
2002, vol.14, no.4
2002, vol.14, no.5
2002, vol.14, no.6
2002, vol.14, no.7
2002, vol.14, no.8
题名
作者
出版年
年卷期
Characteristics of plasmaless dry etching of silicon-related materials using chlorine trifluoride gas
Yoji Saito
2002
2002, vol.14, no.5
Silicon dioxide micropillars for sieving fabricated by macroporous silicon-based micromachining
Shinichi Izuo; Hiroshi Ohji; Patrick J. French; Kazuhiko Tsutsumi; Masafumi Kimata
2002
2002, vol.14, no.5
High-sensitivity hybrid hall effect ICs with thin film hall elements
Kazutoshi Ishibashi; Ichiro Okada; Ichiro Shibasaki
2002
2002, vol.14, no.5
Heteroepitaxial growth of GaN on γ-Al{sub}2O{sub}3/Si substrate by organometallic vapor phase epitaxy
Akihiro Wakahara; Nobuharu Kawamura; Hiroshi Oishi; Hiroshi Okada; Akira Yoshida; Makoto Ishida
2002
2002, vol.14, no.5
Growth-mode control in sublimation epitaxy of AlN
Tomoaki Furusho; Shigehiro Nishino
2002
2002, vol.14, no.5
Influence of initial layers on crystallinity of NiO(111) epitaxial film grown at room temperature by pulsed laser deposition
Yoshiharu Kakehi; Satoru Nakao; Kazuo Satoh; Tadaoki Kusaka
2002
2002, vol.14, no.5
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