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期刊
ISSN
0914-4935
刊名
Sensors and materials
参考译名
传感器与材料
收藏年代
1998~2023
全部
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1999, vol.11, no.1
1999, vol.11, no.2
1999, vol.11, no.3
1999, vol.11, no.4
1999, vol.11, no.5
1999, vol.11, no.6
1999, vol.11, no.7
1999, vol.11, no.8
题名
作者
出版年
年卷期
Behavior of the developing process for ultradeep microstructures
Cheng-Tang Pan; Hsiharng Yang; Horng-Jee Wang; Min-Chieh Chou
1999
1999, vol.11, no.6
Fabrication and study of a shallow-gap Pirani vacuum sensor with a linearly measurable atmospheric pressure range
Bruce C. S. Chou; Chung-Nan Chen; Jin-Shown Shie
1999
1999, vol.11, no.6
Fabrication of 3-D microcoils with ferromagnetic cores using a standard CMOS process
Lungjieh Yang; Kuangyeu Hsieh; Jinghung Chiou; Jennyi Chen; Chienliu Chang; Peizen Chang
1999
1999, vol.11, no.6
Fabrication of a sensitive germanium microbolometer for tympanic thermometry
Chung-Nan Chen; Jin-Shown Shie
1999
1999, vol.11, no.6
Manufacturing processes for LIGA spinnerets
B. -Y. Shew; Y. Cheng; C. -H. Lin; W. -P. Ma; G. -J. Huang; C. -L. Kuo; S. -C. Tseng; D. -S. Lee; G. -L. Chang
1999
1999, vol.11, no.6
Status of HARMST in Taiwan
Yao Cheng
1999
1999, vol.11, no.6
Ultralow-stress silicon-rich nitride films for microstructure fabrication
Ming-Cheng Cheng; Chin-Piao Chang; Wen-Sheh Huang; Ruey-Shing Huang
1999
1999, vol.11, no.6
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