长垣产业园区科技文献服务平台

期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2015, vol.25, no.1 2015, vol.25, no.10 2015, vol.25, no.11 2015, vol.25, no.12 2015, vol.25, no.2 2015, vol.25, no.3
2015, vol.25, no.4 2015, vol.25, no.5 2015, vol.25, no.6 2015, vol.25, no.7 2015, vol.25, no.8 2015, vol.25, no.9

题名作者出版年年卷期
Investigation of a zirconia co-fired ceramic calorimetric microsensor for high-temperature flow measurementsLekholm, Ville; Persson, Anders; Klintberg, Lena; Thornell, Greger20152015, vol.25, no.6
Modulating surface stiffness of polydimethylsiloxane (PDMS) with kiloelectronvolt ion patterningLiu, Boyin; Fu, Jing20152015, vol.25, no.6
Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG processWang, Li-Feng; Han, Lei; Tang, Jie-Ying; Huang, Qing-An20152015, vol.25, no.6
Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMSLee, Jae-Wung; Sharma, Jaibir; Merugu, Srinivas; Lin, Zhang Xiao; Singh, Navab; Narducci, Margarita Sofia20152015, vol.25, no.6
Design optimization and performance analysis of deformed optical readout focal plane arrayFu, Jianyu; Shang, Haiping; Shi, Haitao; Li, Zhigang; Yi, Ou; Chen, Dapeng; Zhang, Qingchuan20152015, vol.25, no.6
Improvement of feature-scale profile evolution in a silicon dioxide plasma etching simulator using the level set methodMontoliu, C.; Baer, E.; Cerda, J.; Colom, R. J.20152015, vol.25, no.6
Ink-jet printing technology enables self-aligned mould patterning for electroplating in a single stepMeissner, M. V.; Spengler, N.; Mager, D.; Wang, N.; Kiss, S. Z.; Hoefflin, J.; While, P. T.; Korvink, J. G.20152015, vol.25, no.6
Microfluidic valve array control system integrating a fluid demultiplexer circuitKawai, Kentaro; Arima, Kenta; Morita, Mizuho; Shoji, Shuichi20152015, vol.25, no.6
Programmable and self-demolding microstructured molds fabricated from shape-memory polymersMeier, Tobias; Bur, Julia; Reinhard, Maximilian; Schneider, Marc; Kolew, Alexander; Worgull, Matthias; Hoelscher, Hendrik20152015, vol.25, no.6
Electromagnetic microforging apparatus for low-cost fabrication of molds for microlens arraysPribosek, Jaka; Diaci, Janez20152015, vol.25, no.6
1234



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  京公网安备11010202008970号  机械工业信息研究院 2018-2024