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期刊
ISSN
1341-8939
刊名
電気学会論文誌
参考译名
电气学会论文志,E:传感器与微型机器部分
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1999~2025
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2000, vol.120-E, no.1
2000, vol.120-E, no.10
2000, vol.120-E, no.11
2000, vol.120-E, no.12
2000, vol.120-E, no.2
2000, vol.120-E, no.3
2000, vol.120-E, no.4
2000, vol.120-E, no.5
2000, vol.120-E, no.6
2000, vol.120-E, no.7
2000, vol.120-E, no.8-9
题名
作者
出版年
年卷期
3-D micromachining with TIEGA process
Takanori Katoh
2000
2000, vol.120-E, no.7
3-dimensional microstructure fabrication using multiple moving mask deep X-ray lithography process
Osamu Tabata; Kouichi Terasoma; Norihiro Agawa; Kouji Yamamoto
2000
2000, vol.120-E, no.7
A silicon shadow mask with unlimited patterns and a mechanical alignment structure by Al-delay masking process
Yoshio Mita; Agnes Tixer; Satoshi Oshima; Makoto Mita; Jean-Philippe Gouy; Hiroyuki Fujita
2000
2000, vol.120-E, no.7
A study of thin film transfer in a novel fabrication method for 3-D microstructures using surface-activated bonding
Takayuki Yamada; Mutsuya Takahashi
2000
2000, vol.120-E, no.7
Advanced micro stereolithography with multi UV polymers (system development and application to three-dimensional optical waveguides)
Shoji Maruo; Toshihide Ninagawa; Koji Ikuta
2000
2000, vol.120-E, no.7
Development of microconnectors using 3 dimensional micromachining based on deep X-ray lithography
Tsuyoshi Haga; Hiroshi Okuyama; Yoshihiro Hirata; Hiroshi Takada
2000
2000, vol.120-E, no.7
Effect of potassium ion on anisotropy of TMAH
Osamu Tabata; Manabu Yashima; Tetsuo Yoshioka; Kazuo Sato
2000
2000, vol.120-E, no.7
Fabrication of sub-micron structures with high aspect ratio for practical MEMS
Hiroshi Ueno; Nobuyoshi Nishi; Susumu Sugiyama
2000
2000, vol.120-E, no.7
Nano protuberance and groove processing of silicon by diamond tip sliding
Shojiro Miyake; Jong-duk Kim
2000
2000, vol.120-E, no.7
Trapping of microstructure by laser scanning manipulation
Miwa Masafumi; Misawa Hiroaki; Kaneko Reizou
2000
2000, vol.120-E, no.7
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