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期刊


ISSN1341-8939
刊名電気学会論文誌
参考译名电气学会论文志,E:传感器与微型机器部分
收藏年代1999~2025



全部

1999 2000 2001 2002 2003 2004
2005 2006 2007 2008 2009 2010
2011 2012 2013 2014 2015 2016
2017 2018 2019 2020 2021 2022
2023 2024 2025

2000, vol.120-E, no.1 2000, vol.120-E, no.10 2000, vol.120-E, no.11 2000, vol.120-E, no.12 2000, vol.120-E, no.2 2000, vol.120-E, no.3
2000, vol.120-E, no.4 2000, vol.120-E, no.5 2000, vol.120-E, no.6 2000, vol.120-E, no.7 2000, vol.120-E, no.8-9

题名作者出版年年卷期
3-D micromachining with TIEGA processTakanori Katoh20002000, vol.120-E, no.7
3-dimensional microstructure fabrication using multiple moving mask deep X-ray lithography processOsamu Tabata; Kouichi Terasoma; Norihiro Agawa; Kouji Yamamoto20002000, vol.120-E, no.7
A silicon shadow mask with unlimited patterns and a mechanical alignment structure by Al-delay masking processYoshio Mita; Agnes Tixer; Satoshi Oshima; Makoto Mita; Jean-Philippe Gouy; Hiroyuki Fujita20002000, vol.120-E, no.7
A study of thin film transfer in a novel fabrication method for 3-D microstructures using surface-activated bondingTakayuki Yamada; Mutsuya Takahashi20002000, vol.120-E, no.7
Advanced micro stereolithography with multi UV polymers (system development and application to three-dimensional optical waveguides)Shoji Maruo; Toshihide Ninagawa; Koji Ikuta20002000, vol.120-E, no.7
Development of microconnectors using 3 dimensional micromachining based on deep X-ray lithographyTsuyoshi Haga; Hiroshi Okuyama; Yoshihiro Hirata; Hiroshi Takada20002000, vol.120-E, no.7
Effect of potassium ion on anisotropy of TMAHOsamu Tabata; Manabu Yashima; Tetsuo Yoshioka; Kazuo Sato20002000, vol.120-E, no.7
Fabrication of sub-micron structures with high aspect ratio for practical MEMSHiroshi Ueno; Nobuyoshi Nishi; Susumu Sugiyama20002000, vol.120-E, no.7
Nano protuberance and groove processing of silicon by diamond tip slidingShojiro Miyake; Jong-duk Kim20002000, vol.120-E, no.7
Trapping of microstructure by laser scanning manipulationMiwa Masafumi; Misawa Hiroaki; Kaneko Reizou20002000, vol.120-E, no.7